PUBLICATIONS
Climate Change Luminary Lights Up the Way to Carbon Footprint Reduction
An article from the Singapore Environment Institute about the work of our CEO and Founder,
Dr. Sebastien Raoux.
Carbon trading and the semiconductor industry
Our latest paper, published in Semiconductor International, reviews how the semiconductor industry can further reduce greenhouse gas emissions by embracing carbon trading mechanisms.
Meeting the climate challenge:
Applying Moore's law to reduce greenhouse gas emissions from the electronics industry.
This paper, published in Fab Engineering and Operations Magazine, talks about solutions and the upcoming regulatory and business trends related to PFC emissions reduction from the electronics industry.
Reducing your carbon footprint…? Think fluorine first
This article provides an overview of the use of fluorinated compounds contributing to climate change and examines ways to reduce their emissions.
Perfluorocompounds (PFCs) emissions reduction in the semiconductor and silicon industries.
This presentation was part of the International Symposium on Near-Term Solutions for Climate Change in California, organized by the California Air Resource Board in Sacramento, CA, March 5-7, 2007.
Implementing technologies for reducing PFC emissions
This article, published in Solid State Technologies, reviews the various solutions that can be used to
reduce PFC emissions and examine their economical implications.
Strategies for cost effective implementation of PFC emissions reduction solutions
in the semiconductor industry
This article provides an overview of the strategy to reduce emissions in a semiconductor fab at the lowest possible cost
Alternatives to reduce perfluorinated compound (PFC) emissions from semiconductor dielectric etch processes: meeting environmental commitments while minimizing costs
This articles focuses on PFC emissions from etch processes and uses design for environment (DfE) analysis to compare processes and options.
Remote microwave plasma source for cleaning chemical vapor deposition chambers:
technology for reducing global warming gas emissions
This article, published in the Journal of Vaccum Science and Technology, describes the revolutionary remote clean technology which led to a two orders of magnitude reduction in greenhouse gas emissions from CVD chamber cleaning processes
Remote NF3 chamber clean virtually eliminates PFC emissions from CVD chambers and improves system productivity
This article provides an overview of the NF3 chamber cleaning technology which allows to reduce emissions from CVD chamber cleaning
PFC Abatement in Capacitively-Coupled Plasma Reactor
This article reviews the development of a low-pressure plasma source designed to abate PFC emissions from dielectric etch systems
Growth, trapping and abatement of dielectric particles in PECVD systems
This article, published in Plasma Sources Science and Technology, presents a solution to reduce solid waste and greenhouse gas emissions from chemical vapor deposition processes
An article from the Singapore Environment Institute about the work of our CEO and Founder,
Dr. Sebastien Raoux.
Carbon trading and the semiconductor industry
Our latest paper, published in Semiconductor International, reviews how the semiconductor industry can further reduce greenhouse gas emissions by embracing carbon trading mechanisms.
Meeting the climate challenge:
Applying Moore's law to reduce greenhouse gas emissions from the electronics industry.
This paper, published in Fab Engineering and Operations Magazine, talks about solutions and the upcoming regulatory and business trends related to PFC emissions reduction from the electronics industry.
Reducing your carbon footprint…? Think fluorine first
This article provides an overview of the use of fluorinated compounds contributing to climate change and examines ways to reduce their emissions.
Perfluorocompounds (PFCs) emissions reduction in the semiconductor and silicon industries.
This presentation was part of the International Symposium on Near-Term Solutions for Climate Change in California, organized by the California Air Resource Board in Sacramento, CA, March 5-7, 2007.
Implementing technologies for reducing PFC emissions
This article, published in Solid State Technologies, reviews the various solutions that can be used to
reduce PFC emissions and examine their economical implications.
Strategies for cost effective implementation of PFC emissions reduction solutions
in the semiconductor industry
This article provides an overview of the strategy to reduce emissions in a semiconductor fab at the lowest possible cost
Alternatives to reduce perfluorinated compound (PFC) emissions from semiconductor dielectric etch processes: meeting environmental commitments while minimizing costs
This articles focuses on PFC emissions from etch processes and uses design for environment (DfE) analysis to compare processes and options.
Remote microwave plasma source for cleaning chemical vapor deposition chambers:
technology for reducing global warming gas emissions
This article, published in the Journal of Vaccum Science and Technology, describes the revolutionary remote clean technology which led to a two orders of magnitude reduction in greenhouse gas emissions from CVD chamber cleaning processes
Remote NF3 chamber clean virtually eliminates PFC emissions from CVD chambers and improves system productivity
This article provides an overview of the NF3 chamber cleaning technology which allows to reduce emissions from CVD chamber cleaning
PFC Abatement in Capacitively-Coupled Plasma Reactor
This article reviews the development of a low-pressure plasma source designed to abate PFC emissions from dielectric etch systems
Growth, trapping and abatement of dielectric particles in PECVD systems
This article, published in Plasma Sources Science and Technology, presents a solution to reduce solid waste and greenhouse gas emissions from chemical vapor deposition processes
